摘要 |
PURPOSE:To prevent the generation of a leakage current incurring the stop of oscillation of a piezoelectric oscillator, by forming a protective film on the surface of a driving electrode formed on the piezoelectric element and also a water- repelling thin film on the surface of the protective film. CONSTITUTION:A quartz chip 5 is an AT plate of planoconvex shape with thickness slip oscillation, and driving electrode 6 and 7 consisting of silver, aliminum or tin oxide chemically stable as a strong metallic oxide film are formed incorporatedly together with lead electrodes 6a and 7a on major planes 5a and 5b with large oscillation change. Driving electrodes 6 and 7 form water- repelling thin films 12 and 13 on the surface of the protective film and are coated with protective films 10 and 11 to avoid the effect the sulfuric or ionic vapor, allowig to prevent the adering of water drops or fine dusts and the generation of leakage current even under wet environment. |