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发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH04110464(A)
申请公布日期
1992.04.10
申请号
JP19900231122
申请日期
1990.08.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
MAEKAWA KAZUYOSHI
分类号
C23C14/36;C23C14/35;H01L21/203
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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