DEVICE FOR PRODUCING FILMS OF MIXED METAL OXIDES

摘要

PCT No. PCT/EP91/00325 Sec. 371 Date Oct. 13, 1992 Sec. 102(e) Date Oct. 13, 1992 PCT Filed Feb. 21, 1991 PCT Pub. No. WO91/13185 PCT Pub. Date Sep. 5, 1991.In the device for producing thin films of metal oxides from organic metal compounds on a substrate, there is a truncated pyramidal hollow body (3) in an evacuable housing (1). Disposed concentrically with respect to the axis of symmetry (16) of the hollow body (3) in its base (7) are at least three furnaces (8) which have reception devices (9) for the metal compounds (10) to be evaporated. The reception devices (9) are provided with guide pipes (11) which project into the hollow interior of the hollow body (3) and are inclined towards its axis of symmetry (16). The casing (12) of the truncated pyramid merges into a pipe (13) above whose end there is disposed a heatable reception device (5) for the substrate (4). A gas feed pipe (6) terminates in the hollow interior [sic] of the hollow body (3) between the guide pipes (11) and the end of the pipe (13).