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发明名称
摘要
申请公布号
JPS5759669(B2)
申请公布日期
1982.12.15
申请号
JP19750068399
申请日期
1975.06.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
OOSAKI SABURO;KIJIMA KOICHI
分类号
H01L21/76;H01L21/205
主分类号
H01L21/76
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