| 摘要 |
PURPOSE:To decrease the capacitance of a disk memory, and to increase the speed of drawing by memorizing character data to the disk memory, enabling reading by a disk memory address and drawing a comment to one deflection field pattern in one character correspondence form. CONSTITUTION:Electron beams 2 are irradiated to a mask 5, each controlling system 8, 9, 13 of blankers, a polariscope and a sample base is controlled by a CPU 7, and an IC pattern 12 is drawn by a drawing pattern read from the disk memory 6. In this case, the character data for the comment consisting of the alphabet and figures are memorized to the memory 6, the disk memory address corresponding to the data is referred and the character data are read, one character is made correspond to the one deflection field pattern and the comment 5 is drawn. Accordingly, the capacitance of the disk memory is decreased, and the speed of drawing of the comment can be increased. |
