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发明名称
METHOD OF FORMING GATE INSULATOR
摘要
申请公布号
JPS57204173(A)
申请公布日期
1982.12.14
申请号
JP19820084096
申请日期
1982.05.20
申请人
INTERN BUSINESS MACHINES CORP
发明人
BUERUNAA GESURAA;ANNERIEZE SUTORUUBE;MANFURETSUDO TSURUHAIDO
分类号
H01L29/78;H01L21/28;H01L21/288;H01L21/316;H01L29/51
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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