发明名称 Flow regulating apparatus and flow measuring apparatus for porous hydrostatic bearing
摘要 A flow regulating apparatus for a porous hydrostatic bearing includes a measuring device for measuring a flow of injected gas through a bearing surface of the hydrostatic bearing to be regulated, a pattern member having a plurality of application pattern portions of different opening ratios on each of which a plurality of small holes are formed in a dispersive manner, and an application device for applying solvent on the bearing surface through the pattern member. A proper pattern portion is selected based on a flow measured by the measuring device, and the proper pattern portion and the application device are aligned with a portion of the bearing surface to which the solvent is to be applied. The solvent is then applied and this operation is repeated until the flow measured by the measuring device becomes a predetermined value.
申请公布号 US5203204(A) 申请公布日期 1993.04.20
申请号 US19910769215 申请日期 1991.10.01
申请人 CANON KABUSHIKI KAISHA 发明人 MIYAZAKI, TAKATOMI;OSAKI, SATOSHI
分类号 F16C32/06;G05D7/06 主分类号 F16C32/06
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