发明名称 |
METHOD FOR CONTROLLING RESIST REMOVING LIQUID |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for accurately evaluating the life of a resist removing liquid and for controlling the resist removing liquid based on the evaluation, and to provide a method for extending the life of the resist removing liquid. SOLUTION: The concentration of carbonic acid gas in the resist removing liquid is maintained to <=3 wt.%. |
申请公布号 |
JP2003122029(A) |
申请公布日期 |
2003.04.25 |
申请号 |
JP20010321248 |
申请日期 |
2001.10.18 |
申请人 |
MITSUBISHI GAS CHEM CO INC |
发明人 |
IKEMOTO KAZUTO;MARUYAMA TAKEHITO;YOSHIDA HIROSHI |
分类号 |
G03F7/42;H01L21/027;(IPC1-7):G03F7/42 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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