| 摘要 |
PURPOSE:To inexpensively form an uneven shape with good reproducibility and controllability on a conductive film on a substrate by providing the steps of coating a substrate with a solution containing organic metal compound, transferring the uneven shape to the coated film in contact with a mold material, and heating it from an exterior to convert to a film having a conductivity. CONSTITUTION:A glass substrate 1 is coated with a solution which contains an organic metal compound by a dipping method. A mold material 4 is pressed on the coated film to transfer an uneven shape to form a coated film 3 having an uneven shape. The material 4 exhibits a sawtooth shape, and actually has a triangularly conical uneven shape. However, this is not limited to this shape, and the film 3 having arbitrary uneven shape as long as the material can be molded. Then, the substrate 1 formed with the film 3 having the uneven surface is heated in a high temperature atmosphere. At this time, after an organic solvent contained in the film is removed, it is baked in a nitrogen atmosphere to which oxygen is added to form a transparent conductive tin oxide film 5 having an uneven surface shape on the substrate 1. |
