| 摘要 |
PURPOSE:To measure length automatically and accurately, by a method wherein image of circuit pattern is displayed on a screen of a Braun tube, a marker is moved to corresponding portion between two points, and electric signal for generating the marker or the like is used. CONSTITUTION:Image of a circuit pattern is displayed on a screen 5a of a Btaun tube 5 using a scanning type electron microscope. On the screen 5a, a marker MK displayed by brightness modulation is moved to corresponding portion between two points in the circuit pattern image. Length between required two points in the circuit pattern is measured by electric signal for generating the marker MK and electric signal corresponding to the image between two points. |
