| 摘要 |
PURPOSE:To obtain a sample base which scarcely moves up and down in the course of scanning, by supporting the sample base by bearings supported by air static pressure from the upper and lower surfaces and also the side. CONSTITUTION:A sample base 1 is constituted of a T-shaped sectional structure, and its horizontal part is supported by static pressure of compressed air exhausted from bearings 2 placed on both its sides. Also, both sides of the vertical part of the sample base 1 are supported by bearings 3. The bearings 2 place the sample base 1 between their guide parts 4, and on the guide part 4, a compressed air leading-in port 5 is provided, and communicates with a compressed air exhaust port 6 provided to a prescribed position. The sample base 1 is held from the upper and lower directions by compressed air exhausted from the compressed air exhaust port 6. Also, as for the bearings 3, a compressed air exhaust port 7 is provided at a prescribed part on the side of the sample base 1, and to this exhaust port 7, a compressed air leading-in port 8 communicates, and the sample base 1 is supported from the sides by compressed air exhausted from the compressed air exhaust port 7. |
