| 摘要 |
PURPOSE:To realize a sample base by which a sample is scarcely moved up and down in the course of scanning, by constituting so that the sample holding base is supported in a noncontacting state, and also fixing the sample by electrostatic force. CONSTITUTION:Compressed air is made to flow between 2 bearings placed on both sides of a sample base 16, and the sample base 16 so that the sample base 16 is supported by its static pressure. On a guide part 14, a compressed air exhaust port 15 is installed to a prescribed position, the sample base 16 is held by compressed air from this exhaust port 15, compressed air is taken in from an intake port 17, and the sample base 16 is driven by a driving shaft 18. Also, an object to be inspected is fixed by an electrostatic chuck. In this way, as for a sample in the course of scanning, its work can be performed under the condition that the sample is scarcely moved up and down. |
