| 摘要 |
PURPOSE:To improve the efficiency of inspection by memorizing one unit in a repetition pattern and by using this unit as a standard for comparison with a scanning signal obtained by scanning a repetition pattern to be inspected. CONSTITUTION:One unit in a repetition pattern is scanned by an image sensor 9, and a scanning signal thus obtained is converted into a digital signal by an A/D converter 10 and stored in a memory 11. Thereafter, the repetition pattern of a pattern to be inspected is scanned sequentially and compared by a comparator 14 with a reference pattern stored in the memory 11 for inspecting an abnormality of the pattern. By this constitution, the efficiency of inspection is improved, since it becomes unnecessary to prepare reference pattern data on a magnetic tape or the like prior to the inspection, and the memory 11 can be made small in capacity, since only memorization of one unit in the repetition pattern is needed. |
