| 摘要 |
PURPOSE:To eliminate the influence of the pressure reduction of the vessel inside upon the installation accuracy of apparatus by placing the apparatus on the base plates of the beds fixed to a foundation, and using the inner side wall contg. the apparatus as a through-passage for the outside air. CONSTITUTION:Plural apparatus 5 are mounted on the base plates 10 on the other top surfaces of beds 11 which are fixed at one end to a foundation 1. These apparatus are contained in a vessel 12 of which the bottom plate is a plate 13 passing through the intermediate of the beds 11. Further, an inner side wall 17 of a small diameter cylindrical shape secured to the top plate 16 and plate 13 of the vessel 12 serves as a through-passage 19 through which the outside air flows. If the inside of the vessel 12 is evacuated with such constitution, deformation owing to pressure differences is induced but the apparatus on the base plates are not influenced by this and since the inner side wall is the through-passage, the apparatus are rarely affected by temps. |
