| 摘要 |
PURPOSE:To simplify the constitution of a capacity detection part by fixing a pressue receiving body and an internal electrode base at a flexible part supported on a duct, and providing an intenal electrode in the plane perpendicular to the axis of the internal electrode base. CONSTITUTION:At a supporting part 7 fixed on a duct 1, a thin-film flexible part 71 is provided, and a columnar pressure receiving body 2 is inserted into the duct 1 at one end and connected to the flexible part 71 at the other end. Further, one end of the main body part 81 of an internal electrode base 8 is fixed on the flexible part 71, and a base part 82 of ceramic is provided at the other end of the main body part 8. On one end surface of the base part 82, internal electrodes 821 and 822 are arranged symmetrically at right angles to the duct. An external electrode base 9 is provided to the outside of the internal electrode base 8; and one end of the main body part 91 is fixed on the supporting part 7, and a base part 92 is provided at the other end. The base part 92 is provided with external electrodes 921 and 922 oppositely to the electrodes 821 and 822. |
