| 摘要 |
PURPOSE:To enable an efficient energy analysis to be carried out with a small energy analyzer, without any need of increasing the diameter of an outer cylindrical electrode, by providing auxiliary electrodes which extend from the slits of an inner cylindrical electrode toward an incoming and an outgoing point, and which have electric potentials differing continuously from one end to the other end. CONSTITUTION:Auxiliary electrodes 9 and 10 are provided so that they protrude from an incoming and an outgoing slit 4 and 5 toward an incoming and an outgoing point 6 and 8. Since each of the electrodes 9 and 10 consists of two opposed conical plates extending along the orbit of charged particles 7, conical slits 11 and 12 are formed on the inner sides of both ends of an inner cylindrical electrode 1. The electrodes 9 and 10, which have an inner diameter of (r3), are given electric potentials differing continuously from the joint parts of the electrode 1 to the ends of the electrodes 9 and 10. Here, the gradient of the above potential change of the electrodes 9 and 10 is made to be the extension of the gradient of continuous potential change between an outer cylindrical electrode 2 and the electrode 1. As the result, a continuous electric field is formed between the electrode 2 and the ends of the electrodes 9 and 10. |
