Zinc oxide thin film sensor having improved reducing gas sensitivity

摘要

In a preferred embodiment, the concentration of hydrogen or other reducing species in a gaseous sample is determined by measuring the electrical resistance of a zinc oxide thin film semiconductor having a gas-sensing surface exposed to the sample and carrying a thin spotted coating of a palladium-gold alloy. The palladium-gold alloy substantially improves the sensitivity of the resistance of the zinc oxide film to the presence of the reducing species.