| 摘要 |
PURPOSE:To make it possible to highly integrate a multinozzle head for an ink jet printer by such an arrangement wherein a vibrating plate and a piezoelectric element are arranged in sequence on a substrate and the piezoelectric element is also arranged so that it corresponds to more than 2 pressurizing chambers. CONSTITUTION:After a substrate 1 is adhered by melting to a vibrating plate 7, an MIM element 11 is formed, and a print head is composed by adhering a piezoelectric element 13 to the above. The substrate 1 is made of glass and a nozzle 2, a pressurizing chamber 3, a supply preparatory chamber 4, a filter 5 and a supply route are formed on it by etching. The vibrating plate 7 is of the same materials as that of the substrate 1 and it is pressurized and adhered by melting to the substrate, and on it a tantalum thin film 8 is formed by spattering, an insulation layer 9 is made by anodic oxidizing part of it and an aluminum electrode 10 is formed by vaporization and the MIM element 11 is composed by etching and corresponding films 8 are connected together. On the piezoelectric element 13, an electrode 14 corresponding to the element 11 is formed by thick film printing and on the upper surface, a common electrode 15 is made, and a thin film resistor 16 is formed between the electrode 14 and 15 by vaporization. |
