| 摘要 |
PURPOSE:To prevent the pollution of a photomask by coating the main face of the photomask with a peelable protective film made of electric conductor to inhibit the photomask from being charged with static electricity. CONSTITUTION:An electrically conductive metallic film or an electrically conductive film of resin kneaded with metallic powder as a protective film 3 is peelably stuck to the main face of a photomask 2 made of glass plate having a desired light transmitting pattern. Thus, the photomask does not cause pollution due to static electricity, so a water is patterned in an enhanced yield. |
