发明名称 Method for the manufacture of a temperature sensitive platinum thin film resistance element.
摘要 <p>A platinum thin film (12) is formed by sputtering on an insulating substrate (11) and heat-aged in a stairstep manner. A kerf (13) is formed in the platinum thin film to have a desired resistance, providing a temperature sensor, or a metal oxide semiconductor film is formed on the platinum thin film having formed therein the kerf, providing a gas sensor.</p>
申请公布号 EP0063264(A1) 申请公布日期 1982.10.27
申请号 EP19820102641 申请日期 1981.04.14
申请人 KABUSHIKI KAISHA KIRK 发明人 YOSHIO, OHNO
分类号 H01C17/12;G01K7/18;G01N27/12;H01C7/22;(IPC1-7):01C7/22;01K7/18;01N27/12;01C17/12;01C13/00 主分类号 H01C17/12
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