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发明名称
Verfahren zur Herstellung einer integrierten Halbleiterschaltung
摘要
申请公布号
DE10164950(B4)
申请公布日期
2010.01.28
申请号
DE20011064950
申请日期
2001.09.07
申请人
QIMONDA AG
发明人
KIRCHHOF, MARKUS
分类号
H01L21/762;H01L21/60;H01L21/768;H01L21/8239
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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