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发明名称
摘要
申请公布号
JPS5749150(B2)
申请公布日期
1982.10.20
申请号
JP19750005337
申请日期
1975.01.09
申请人
发明人
分类号
H01L29/80;H01L21/20;H01L21/205;H01L21/338;H01L29/812
主分类号
H01L29/80
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代理人
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