发明名称 Semiconductor integrated circuit devices
摘要 In a semiconductor integrated circuit device having a polyimide-type resin film 16 formed on a semiconductor substrate 1 and an aluminum wiring layer 17 formed on the surface of the polyimide-type resin film the wiring layer 17 contains between 0.1% to 10% by weight silicon to increase corrosion resistance. Alternatively nickel or boron may be used in place of silicon. <IMAGE>
申请公布号 GB2096826(A) 申请公布日期 1982.10.20
申请号 GB19820005891 申请日期 1982.03.01
申请人 HITACHI LTD 发明人
分类号 H01L21/768;H01L21/312;H01L23/29;H01L23/31;H01L23/522;H01L23/532 主分类号 H01L21/768
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