| 摘要 |
PURPOSE:To achieve array type photocoupling with a high coupling rate by using silicon crystal, which has a positioning groove on the surface, as a positioning fixture. CONSTITUTION:On the array type chip 1 of a light emitting element, light emitting elements 4 and electrode bonding parts 5 are provided, and a positioning fixture 3 consisting of silicon crystal having positioning V grooves 6 is also provided. Therefore, the projecting parts of the mesa type light emitting elements 4 and optical fibers 2 are only positioned on the flanks of the V grooves 6, and consequently the both are fixed completely without any shift in position. Further, the V grooves are formed accurately by carrying out anisotropic etching on a silicon crystal surface, so fine work is facilitated, thus obtaining small- sized structure and high coupling efficiency. |
