发明名称 PROCESSING AND INSPECTING DEVICE FOR ELECTRONIC PART
摘要 PURPOSE:To prevent the overlapping detection and defective detection of reference coordinates by tracking a position to be inspected, detection thereof is completed, and displaying the position while overlapping a marker in a monitor. CONSTITUTION:A tracking means tracking and arithmetically operating the position to be inspected, which is indicated completely by a position setting means through a self-teaching system, and a marker generating means generating the markers indicating the completion of positional detection are added to a display device having the position setting means. When reflections to be inspected 21'(21'-1, 21'-2), 22'(22'-1-22'-4), the detection of positions thereof is completed, are moved from the position of a positioning mark 23, the position to be inspected is tracked and arithmetically operated by said tracking means. When the reflections 21', 22' to be inspected are located in a monitor picture 10, the markers 24 are overlapped to the reflections 21', 22' by said marker generating means, and the position is displayed.
申请公布号 JPS57167648(A) 申请公布日期 1982.10.15
申请号 JP19810045094 申请日期 1981.03.27
申请人 FUJITSU KK 发明人 NAKASHIMA MASAHITO;HIZUKA TETSUO;MIYAMURA MASATO
分类号 H01L21/68;H01L21/60;H01L21/66 主分类号 H01L21/68
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