| 摘要 |
<p>PURPOSE:To inspect automatically without measuring a surface condition of material to be inspected by the eye, by separating reflected light on the material to be inspected of light into two light having a prescribed wavelength at least and photodetecting by two photodetectors at least. CONSTITUTION:A slit 3 is illuminated by radiated light from a white color lamp 1 through a condensing lens 2 and an image of this slit 3 is formed on a material to be inspected 7 through a lens 4, a half-mirror 5 and an objective lens 6. Reflected light of said image of the slit 3 is divided into two buminous flux by a beam splitter 10 through the lens 6, the half-mirror 5, a projection lens 8 and a depolarizer 9 and said flux is photodetected by photodetectors 13, 14 through filters 11, 12 transmitting the light having different wavelength. Further, a ratio or difference of components of two wavelength is detected by a signal processing circuit 17 and good or bad of plating is detected. Hereby, good or bad of the surface condition of the material 7 is judged easily and quickly.</p> |
