| 摘要 |
PURPOSE:To heighten the sticking strength of an electrode to a solid electrolyte element and to lower the interface resistance between the electrode and the element and also, to quicken a response property, by making a sensor of the minute structure by burning the filmy solid electrolyte element after it is formed on the electrode. CONSTITUTION:A porous structure electrode 2 is formed on the one hand face of an alumina plate 1 having porosity and thickness given the diffusion resistance for an oxygen molecule and hereafter, 100-300mu filmy solid electrolyte element 3 formed by 10-30mu grain solid electrolyte material which is obtained by mixing 90-94wt% ZrO2 and 6-10wt% Yb2O3 and crushing, granulating and calcining by a plasma melt-spraying method, is stuck on the electrode 2. An electrode 4 is formed on said melt-sprayed layer and hereafter, the whole element is burnt at 1,400- 1,750 deg.C regularly and moreover, an oxygen concentration sensor is obtained by providing with a protective layer 8. By thus constitution, the interface of the solid electrolyte element and electrode, is stuck closely and the inner resistance of the whole element is decreased and also, a response property is improved because the solid electrolye element is made thin. |
