| 摘要 |
PURPOSE:To prevent the infiltration of the harmful atmosphere into a vacuum treating chamber by providing an universal joint-type communicating mechanism capable of introducing purge gas into the vacuum treating chamber only when the vacuum treating chamber communicates with a equipment for delivering and discharging the material to be treated. CONSTITUTION:A vacuum valve 3 is closed, the adjustable joint-type communicating mechanism 13 is blocked, the inside of the vacuum treating chamber 1 is evacuated to a desired vacuum by an exhauster 2, and then the material is treated in the vacuum treating chamber 1. After the material is treated, the gas is again introduced through the universal joint-type communicating mechanism 13 to turn off the vacuum in the vacuum treating chamber 1, the vacuum valve 3 is opened, and the transport equipment 8 is lifted up and down and rotated to transport the material to be treated into the purging container 4 from the vacuum treating chamber 1. During the transportation of the material to be treated, the gas is introduced by the purge gas supply equipment 9 to prevent the infiltration of the atmosphere into the purging container 4. |
