| 发明名称 |
A method of producing a resistance element for a resistance thermometer. |
| 摘要 |
<p>A resistance thermometer element having a thin layer of platinum metal on an insulating substrate is formed by magnetron sputtering in a gaseous atmosphere containing at least 10% by volume of oxygen. Any balance gas has less than 10% by volume of krypton and xenon. The atmosphere may have up to 100% oxygen with any balance gas being inert to platinum. Air can be used. A planar magnetron may be used.</p> |
| 申请公布号 |
EP0061887(A1) |
申请公布日期 |
1982.10.06 |
| 申请号 |
EP19820301505 |
申请日期 |
1982.03.23 |
| 申请人 |
ROSEMOUNT ENGINEERING COMPANY LIMITED |
发明人 |
JOHNSTON, JAMES STEWART;HOLLAND, LESLIE;WRIGHT, CHRISTOPHER R. |
| 分类号 |
C23C14/00;G01K7/18;H01C7/22;H01C17/12;(IPC1-7):23C15/00;01C7/22;01C17/12;01K7/18 |
主分类号 |
C23C14/00 |
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