| 摘要 |
PURPOSE:To measure electrically the thickness of a diaphragm via window parts, by arranging window parts through which a single-crystal substrate is exposed at the position opposed to the diaphragm. CONSTITUTION:Diffused resistor layers 53, 54 showing resistance change according to pressure are arranged on the surface of the diaphragm 52 of the single- crystal substate 51. Autoprober needles 60, 61, 62, 63 contact the substrate 51 via n<+> layers 56-59 arranged on the window parts of a protecting film 64. The measurement of the voltage between the needles 60, 63 with constant current flowing through the needles 61, 62 can measure the thickness of the diaphragm. |
