| 发明名称 |
Corrosion inhibition of aluminum or aluminum alloy film utilizing bromine-containing plasma |
| 摘要 |
Bromine-containing plasma is utilized to inhibit corrosion of aluminum or aluminum alloy films which have been etched utilizing a chlorinated plasma.
|
| 申请公布号 |
US4351696(A) |
申请公布日期 |
1982.09.28 |
| 申请号 |
US19810315693 |
申请日期 |
1981.10.28 |
| 申请人 |
FAIRCHILD CAMERA & INSTRUMENT CORP. |
发明人 |
RADIGAN, KENNETH J. |
| 分类号 |
C23F4/00;C23C8/02;C23C8/36;H01L21/02;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/30 |
主分类号 |
C23F4/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
