| 摘要 |
PURPOSE:To manufacture a recording medium having superior magnetic characteristics efficiently by ionizing and sending mixed gas of N2, Ar, etc., and O2 to a base under specific conditions when forming a vacuum-deposited layer of Co or Co alloy on the base. CONSTITUTION:When a magnetic layer is formed on a base 5 by vacuum-depositing Co or Co alloy on the base 5, mixed gas of gaseous N2, gaseous Ar or He, and gaseous O2 is ionized by a cold cathode type ion source 9 and then sent to the base 5. In this case, the gaseous N2 and gaseous Ar or He are mixed at a 0.2-5 gas pressure rate (N2/Ar or He), and this mixed gas is allowed to exit in a system within a 60-60,000mum/minute/Torr range of a deposition speed/ mixed gas pressure value. The gaseous O2, on the other hand, is also allowed to exit in the system within a 6,000-6,000,000mum/minute/Torr range of a deposition speed/gaseous O2 pressure value. |
