| 摘要 |
PURPOSE:To reduce the injection angle of a ferromagnetic atom flying from a ferromagnetic target toward a substrate, by constructing a groove, to be formed at the front portion of the ferromagnetic target, with a plurality of annular slots each successively arranged adjacent together. CONSTITUTION:A groove 3 having a nearly V-shaped section is fromed at the front portion of a ferromagnetic target 1. The groove 3 is constructed with a plurality of annular slots 3a having nearly circular planes, each successively arranged adjacent together back and forth and right and left. Each annular slot 3a is formed by checkered arrangement of reverse conical circular holes 3b on the target 1 and insertion of a conical angular body 3c into each circular hole 3b. A magnetic field generator 2 is constructed with a checkered magnet 2a and rod-like magnets 2b. These magnets are arranged in such a manner that the checkered S-pole magnet 2a acts on the periphery of the circular holes 3b from their backside, while the rod-like N-pole magnets 2b act on the backside surfaces of the angular bodies 3c. Owing to these arrangement, an injection angle is controlled at a nearly uniform level, and a ferromagnetic film whose magnetic property is not affected can be obtained. |
