| 摘要 |
PURPOSE:To smoothly shift a stage by forming a linear motor from a movable element installed at the both edge parts of the X-Y transfer shaft and a stator installed along a guide shaft in correspondence with the movable element. CONSTITUTION:A linear motor 24 is constituted of a linear motor movable element 22 and a linear motor stator 23. A linear encoder 25 is installed onto an X-guide shaft 12 and a Y-guide shaft 14 by extending the upper parts of the X-Y transfer shaft supporting bearings 17 and 19. The linear encoder 25 is constituted of a linear encoder movable part 26 installed in the lower part of the extension parts 17a and 19a of the upper parts of the X-Y transfer shaft supporting bearings 17 and 19 and a linear encoder fixed part 27 which corresponds in the noncontact state to the linear encoder movable part 26. The linear encoder fixed part 27 is installed along the outside of the linear encoder stator 23. |
