| 摘要 |
PURPOSE:To detect the defects generated to the contours of sub-patterns and the defects generated around and inside a main pattern by comparing scanning width on one sub-pattern, continuity thereof is identified, and scanning width on the other sub-pattern. CONSTITUTION:The continuity of sub-straight entities 10-1, 10-2 is tested in a processing system at every one scanning line until the extinction of the entities is confirmed after a scanning line 3-3. An island 12-1 as the defect section of a copper foil 9 is detected in a scanning line 3-5, but it is out of the question when the width is within standard value. Since a mustache 11-1 is regarded as continuation to the sub-straight entity 10-2 or branching and received by the processing system, the sub-straight entity 10-2 is compared with the sub-straight entity 10-1, and abnormality can be recorded and displayed at that time. |
