| 摘要 |
PURPOSE:To detect leakage rapidly using a small amount of gas without raising pressure in a sealed container, by a method wherein gas leaking out of a sealed container to be inspected is introduced into a vacuum container and detected there. CONSTITUTION:Open end of a vacuum container is pushed against leakage detecting portion of a sealed container to be inspected through vacuum glease or seal substance, gas is exhausted out of an exhaust port at lower side, leaking gas is collected in a vacuum container, and the leaking gas is detected by a gas detector installed in the vacuum container. In this constitution, leakage is detected rapidly using a small amount of gas without raising pressure in the sealed container. |
