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发明名称
HIGH PRESSURE PLASMA HYDROGENATION OF SILICON TETRACHLORIDE.
摘要
申请公布号
EP0052615(A4)
申请公布日期
1982.09.03
申请号
EP19810901232
申请日期
1981.04.06
申请人
MOTOROLA, INC.
发明人
SARMA, KALLURI RAMULINGSUWARA;RICE, MURRAY JOHN, JR.
分类号
B01J12/00;C01B33/107;(IPC1-7):C01B33/107
主分类号
B01J12/00
代理机构
代理人
主权项
地址
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