| 摘要 |
PURPOSE:To form the compact, light, highly reliable humidity sensor having less temperature dependence at low cost, by embedding a plurality of carbon fibers in a humidity sensitive resin layer, and detecting the variation in electric resistance between said fibers. CONSTITUTION:A detecting part 1, wherein the two carbon fibers are embedded in the humidity sensitive resin (e.g. nylon) so that they are crossed at a right angle, is closely contacted with a substrate 2 (a glass plate, alumina plate, and the like). Then electrodes 3 are formed at the ends of the carbon fibers extended from the detecting part 1 by using conductive paste. Lead wires 4 are further extended from the electrodes 3. The electrodes 3 are coated by a bonding agent 5 such as epoxy series resin. Thus the humidity sensor is obtained. In said sensor, when the resin in the detecting part 1 is expanded in the width direction by absorbing the moisture in the surrounding environment, the interval between the carbon fibers in the detecting part 1 is increased, and the contact resistance is increased. By measuring the value of the electric resistance between the carbon fibers, the humidity of the surrounding environment can be obtained. |
