| 摘要 |
PURPOSE:To prevent the air leakage from an adhered part and to improve durability, by bringing the surface finish of a face, where a substrate and the seal material of a diaphragm are adhered to each other, within a prescribed range. CONSTITUTION:Faces of a diaphragm 1 and a substrate 2 which face to each other are sealed along their outside circumferences with an electrically insulating seal material 4 and a conductive adhesive 5 by adhesion. When surface finishes of faces of the diaphragm 1 and the substrate 2 which face to each other and are adhered to the seal material 4 are within a range of 0.5-5mu, the adhesive strength is enhanced, and the secular change of an electrostatic capacity is prevented, and the diaphragm 1 and the substrate 2 are sealed tightly well. |
