| 摘要 |
PURPOSE:To minimize the beam irradiation time and reduce the effect due to the irradiation effect on elements by detecting secondary electrons from pulse beam irradiation with a detector, and inputting and treating outputs form it to a peak-holding circuit. CONSTITUTION:A storoboscopic scanning electron microscope 1 and scan controller 12 are operated by controlling a controller 10 with a computer 8. The peak value of analogue output signal form a secondary electron detector 2 of the electron microscope 1 is holded with a high speed type peak-holding circuit 3, and it is converted to digital signal with a convertor 6 and input to the computer 8 and displayed on a CRT14 as an image. Thus data are input to the computer 8 for each beam, the beam irradiation time can be minimized, and the reverse effect on elements which are sensitive to the effect of beam such as MOS element can be reduced. |
