| 摘要 |
PURPOSE:To make mass production of ion source devices possible and to stabilize the performance thereof in an electric field evaporation type ion source device using a hairpin type heater by providing a material sticking structure and needlelike electrode support members near a needlelike electrode. CONSTITUTION:Needlelike electrode support members 7 are fitted on an insulation substrate 3 of an ion source device, and a needlelike electrode 1 and a spiral heater 2 are fixed thereto independently. In this case, the electrode 1 can be fixed easily in a vertical direction in the central position of the substrate 3. If a soft material such as Ta or Mo is used, the position and direction of the electrode 1 can be finely adjusted after fixing of the electrode 1. On the other hand, the curved part shape of a hairpin type heater is made spiral as shown by 6, and is made into the material sticking structure that surrounds the electrode 1, whereby a material 4 to be ionized is stuck in a large amt. thereon and the life of the ion source device is prolonged. |
