| 摘要 |
<p>In a method and apparatus for forming films of materials which are component layers of solar energy conversion devices, e.g. photovoltaic cells and heat collector panels, a selected substrate (20), generally glass, is heated while being sprayed with solutions which react on the heated surface to form a particular film. Films of SnOx and CdS are particularly produced. According to the invention, a thermal energy input is provided to approximate the energy loss during the spray process. Radiative heaters (14) provide a rapid resupply of energy to the substrate and, in some instances, directly to the film forming surface. Outputs from temperature detectors (22), such as thermocouples, measuring substrate temperature provide the radiative energy input value needed for substantial temperature uniformity. <IMAGE></p> |
