发明名称 ELECTRONIC MICROSCOPE
摘要 PURPOSE:To determine an accurate multiplying factor by detecting the quantity of an electron beam on a phosphor plate and calculating the multiplying factor based on the detected data for display. CONSTITUTION:After a specimen illumination condition is set and fixed at a desired status, a condenser lens system is set at a proper multiplying factor in a normal control method. Next, a coefficient setting knob provided in a calculating circuit 12 is manipulated so that the multiplying factor value indicated on a display unit 13 equals to that already know. Then, the condenser lens system is controlled optionally. When the image multiplying factor on a phosphor plate 7 is varied by this control and the quantity of an electron beam is changed, a correct multiplying factor value is calculated by a calculating circuit 12, and is indicated on the display unit 13.
申请公布号 JPS57130355(A) 申请公布日期 1982.08.12
申请号 JP19810015541 申请日期 1981.02.04
申请人 NIPPON DENSHI KK 发明人 HONMA TERUYASU;WATANABE HISAO
分类号 H01J37/22;H01J37/147;H01J37/26 主分类号 H01J37/22
代理机构 代理人
主权项
地址