| 发明名称 |
MULTILAYER SOLID STATE DEVICE |
| 摘要 |
<p>A plasma polymerized ethane thin film deposited on a variety of substrates has been discovered to be an improved interlayer dielectric. It is a material having property of high dielectric strength and unique low dielectric constant. It also has advantages of depositing pinhole free, crack resistant with good step coverage and low deposition cost.</p> |
| 申请公布号 |
JPS57124812(A) |
申请公布日期 |
1982.08.03 |
| 申请号 |
JP19810196713 |
申请日期 |
1981.12.07 |
| 申请人 |
HONEYWELL INC |
发明人 |
YAKOBU DABURIYUU RIN;RESURII ESU UEINMAN |
| 分类号 |
H05K3/28;B32B27/06;H01B17/60;H01L21/312;H01L23/498;H01L27/01;H05K1/00;H05K1/03;H05K3/46 |
主分类号 |
H05K3/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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