发明名称 |
DYNAMIC SYSTEM FOR VARIABLE HEATING OR COOLING OF LINEARLY CONVEYED SUBSTRATES |
摘要 |
A system is provided for heating or cooling discrete, linearly conveyed substrates having a gap between a trailing edge of a first substrate and a leading edge of a following substrate in a conveyance direction. The system includes a chamber, and a conveyor operably configured within the chamber to move the substrates through at a conveyance rate. A plurality of individually controlled temperature control units, for example heating or cooling units, are disposed linearly within the chamber along the conveyance direction. A controller is in communication with each of the temperature control units to sequentially cycle output of the units from a steady-state temperature output along the conveyance direction as a function of position of the leading and trailing edges of the substrates within the chamber relative to the temperature control units so as to reduce edge-induced temperature variances in the substrates.
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申请公布号 |
US2012060758(A1) |
申请公布日期 |
2012.03.15 |
申请号 |
US201113070661 |
申请日期 |
2011.03.24 |
申请人 |
FELDMAN-PEABODY SCOTT DANIEL;SEYMOUR FREDERICK HARPER;LITTLE EDWIN JACKSON;PAVOL MARK JEFFREY;RATHWEG CHRISTOPHER;PRIMESTAR SOLAR, INC. |
发明人 |
FELDMAN-PEABODY SCOTT DANIEL;SEYMOUR FREDERICK HARPER;LITTLE EDWIN JACKSON;PAVOL MARK JEFFREY;RATHWEG CHRISTOPHER |
分类号 |
H01L31/18;C23C16/02;C23C16/448;C23C16/458;C23C16/52;C23C16/56;F27B9/06 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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