HIGHLY DURABLE MULTILAYERED FILM CONTAINING SILICON OXIDE FILM

摘要

PURPOSE:To obtain a highly durable multilayered film for preventing or increasing reflection or other purpose by laminating a silicon oxide film contg. tin oxide or zirconium oxide and a film of aluminum oxide, zirconium oxide or titanium oxide. CONSTITUTION:This film is obtd. by laminating a silicon oxide film contg. tin oxide and/or zirconium oxide as an additive in a range not causing a practical change in the optical properties of a silicon oxide film and an oxide film of one of aluminum oxide, zirconium oxide and titanium oxide or a mixture thereof. The preferred tin oxide and/or zirconium oxide content of said silicon oxide film is 1-30mol% in terms of oxide to the SiO2 content.