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发明名称
FORMATION OF SILICON NITRIDE FILM
摘要
申请公布号
JPH0296336(A)
申请公布日期
1990.04.09
申请号
JP19880247386
申请日期
1988.10.03
申请人
OKI ELECTRIC IND CO LTD
发明人
YOSHIMARU MASAKI;SHIMOKAWA MASAAKI
分类号
H01L21/318
主分类号
H01L21/318
代理机构
代理人
主权项
地址
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