发明名称 VERTICAL PULLING UP APPARATUS OF RIBBON-LIKE CRYSTAL
摘要 PURPOSE:To reduce the variation in the thickness and width of a ribbon-like crystal, by fixing a capillary die to a die base with a mounting plate, and making gaps between limiters and the limiters and the die adjustable. CONSTITUTION:A capillary die 22 is fixed to a die base 30 with a heat insulating holding plate 26 and mounting plate 28 and capable of lifting and lowering integrally with the die base 30. A melt in the die 22 is heated by a die heater 32 to keep a melt in the die 22 in the liquid phase. A gap 36 is formed between limiters 38 and 38 fixed to supporting members 40 and 40 and lifted and lowered with limiter bases 42 and 42. The gap width (t) between the bottom end of the gap 36 and the top of the capillary die 22 is adjusted to form a meniscus at the optimal position. A ribbon-like crystal is quenched by a heat transfer plate 56 just after the formation thereof. The width of the gap 36 is adjusted by rotating a screw shaft 44 and moving the limiters 38 and 38 to the left and right to prevent the fluctuation of the ribbon-like crystal to be pulled up and reduce the variation in the thickness and width thereof.
申请公布号 JPS57123893(A) 申请公布日期 1982.08.02
申请号 JP19810009717 申请日期 1981.01.27
申请人 TOSHIBA KIKAI KK 发明人 ABE HIROAKI;SUGIURA YASUO
分类号 C30B15/34;H01L21/02;H01L21/208;H01L31/04 主分类号 C30B15/34
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