PLASMA ETCHING DEVICE,申请号JP19810004860-传众专利搜索

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发明名称	PLASMA ETCHING DEVICE
摘要
申请公布号	JPS57120676(A)	申请公布日期	1982.07.27
申请号	JP19810004860	申请日期	1981.01.16
申请人	SUWA SEIKOSHA KK	发明人	NAKAMICHI TADAHIRO
分类号	H01L21/302;C23F1/08;C23F4/00;H01L21/3065;H05K3/00;H05K3/08	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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