| 摘要 |
PURPOSE:To enhance the wear resistance of steel or superhard alloy by alternately laminating Ti compound films and Al2O3 films each having a prescribed thickness on the steel or alloy until the laminate has a prescribed thickness. CONSTITUTION:Steel or superhard alloy as a substrate is coated with a Ti compound film having <=5,000Angstrom thickness by a vapor deposition method, and the film is coated with an Al2O3 film having <=5,000Angstrom thickness. This Al2O3 film is alternately coated with similar Ti compound films and similar Al2O3 films to form a lamination coated film structure having 10000-100000Angstrom thickness. The resulting laminate is a superior material for a wear resistant tool. |
